High quality Bessel beam generation through reflective axicon for femtosecond laser glass microprocessing

Authors: Antonin Billaud¹, Maik Steinbach², Patrick Taschner², Arndt Hohnholz², Gwenn Pallier¹, Sami Laroui¹, Pu Jian¹, Olivier Pinel¹, Jürgen Koch², Guillaume Labroille¹

¹ Cailabs

²Laser Zentrum Hannover eV

Abstract

With the development of touch panel display the need to process thinner glass using Ultra-Short Pulse (USP) laser has increased. Beam shaping improves the process yield and quality but requires specific precautions when applied to USP laser due to high peak power and dispersion.
Bessel beams improve the quality of glass drilling and cutting due to the extended depth of field. We present Bessel beam generation using a reflective off-axis axicon giving a more stable beam compatible with scanning system and with a profile closer to theory. The characteristics of the beam and of the processed glass are described.